| 发明名称 |
Substrate supporting means having wire and apparatus using the same |
| 摘要 |
An apparatus includes: a process chamber for treating a substrate; a susceptor in the process chamber; a supporting frame over the susceptor; and at least one wire connected to the supporting frame.
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| 申请公布号 |
US7942623(B2) |
申请公布日期 |
2011.05.17 |
| 申请号 |
US20100824956 |
申请日期 |
2010.06.28 |
| 申请人 |
JUSUNG ENGINEERING CO. LTD. |
发明人 |
HWANG CHUL-JOO;LEE SANG-DO |
| 分类号 |
H01L21/677;C23C16/00;C23C16/458;C23F1/00;G02F1/133;H01L21/687 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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