发明名称 PROCEDE DE REALISATION D'UN DISPOSITIF OPTIQUE A COMPOSANTS OPTOELECTRONIQUES INTEGRES
摘要 A method for making an optical device with integrated optoelectronic components, including a) making a protective structure including a support in which at least one blind hole is made, an optical element being positioned in the blind hole, b) attaching the support to a substrate including the integrated optoelectronic components, the blind hole forming a cavity in which the optical element faces one of the optoelectronic components, c) achieving thinning of the substrate and making electric connections through the substrate, and d) making an aperture through the bottom wall of the blind hole, uncovering at least one portion of the optical field of the optical element.
申请公布号 FR2931587(B1) 申请公布日期 2011.05.13
申请号 FR20080053293 申请日期 2008.05.21
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 BOLIS SEBASTIEN
分类号 H01L31/18;H01L27/146;H01L31/0232 主分类号 H01L31/18
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