MULTI LAYER THIN FILM FOR ENCAPSULATION AND THE METHOD THEREOF

摘要

PURPOSE: An encapsulation film which is a multi layer thin film and manufacturing method thereof are provided to prevent damage of a device due to heat and ions, thereby increasing manufacture stability of a product. CONSTITUTION: An encapsulation film is a multi layer thin film. The encapsulation film comprises a protective layer(7), a barrier layer, and a mechanical protective layer. The protective layer is made from aluminium oxide. The barrier layer is made from single or double silicon nitride. A mechanical protective layer(8) is made from silicon dioxide. An aluminium oxide protective layer is formed using ozone as an oxidation source based on an ALD(Atomic layer deposition) method.