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发明名称
VERFAHREN ZUR HERSTELLUNG EINES BESCHICHTETEN GEGENSTANDS DURCH SPUTTERN EINES KERAMISCHEN TARGETS
摘要
申请公布号
DE502007006844(D1)
申请公布日期
2011.05.12
申请号
DE200750006844T
申请日期
2007.06.28
申请人
INTERPANE ENTWICKLUNGS-UND BERATUNGSGESELLSCHAFT MBH
发明人
SEVERIN, DANIEL;WUTTIG, MATTHIAS;HERLITZE, LOTHAR;WEIS, HANSJOERG
分类号
C23C14/00;C23C14/06;C23C14/08
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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