发明名称 Horizontal type apparatus for transferring a substrate
摘要 <p>PURPOSE: A lateral substrate conveyor device is provided to expel foreign materials or particles to the outside of the device by forming a lateral absorbent unit on the inside of a transfer belt. CONSTITUTION: A grip conveyor unit(100) compulsorily transfers a substrate. A secondary conveyor unit(200) is placed adjacent to the grip conveyor unit. The secondary conveyor unit supports the substrate so that the substrate is moveable. The scrap paper conveyor unit comprises a main body and a compulsory conveyor belt(120). A space for ventilation is formed in the main body. The compulsory conveyor belt forms a vacuum hole which connects to the space for ventilation.</p>
申请公布号 KR101033159(B1) 申请公布日期 2011.05.11
申请号 KR20080116865 申请日期 2008.11.24
申请人 发明人
分类号 H01L21/68;B65G53/02 主分类号 H01L21/68
代理机构 代理人
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