| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser system or laser exposure system that can increase a dynamic range of laser output without making energy stability worse by pulse. <P>SOLUTION: A main controller 70 of a laser device 1 performs charging voltage control and gas control, so that pulse energy Pin to be input to an output attenuating mechanism 50 may reach a value (target pulse energy PL) at which pulse variance becomes small. Further, transmittance T of the output attenuating mechanism 50 is controlled on the basis of a signal transmitted from an exposure device 200 and indicating the target pulse energy Pt so that output energy of the laser device 1 may reach target pulse energy Pt (<target pulse energy PL) required in the exposure device 200. <P>COPYRIGHT: (C)2011,JPO&INPIT |
