| 摘要 |
PURPOSE: An organic matter depositing device is provided to prevent a monomer from being accumulated on a driving unit, thereby drastically reducing errors of a depo vacuum pump. CONSTITUTION: A chamber(10) provides a space where a monomer is deposited to a substrate(1). A monomer depositing unit(20) sprays a monomer onto the substrate. A depo vacuum pump(30) makes the monomer depositing unit vacuum. A dry depo pump(70) supports the vacuum pressure generation of the depo vacuum pump. A pump vacuum keeping pump(40) keeps the vacuum degree of the depo vacuum pump under a fixed level.
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