| 摘要 |
PURPOSE: A wet etching device of a thin plate is provided to transfer a thin film when the wet etching device is mounted on a jig, thereby preventing the thin plate from being damaged during a thin plate transfer process. CONSTITUTION: A jig(30) comprises an opening exposing both sides of a thin plate(5) to the outside. A transfer unit(50) transfers the jig in a fixed direction. An etching solution spraying unit(60) sprays the etching solution onto the thin plate through the opening when the jig is transferred by the transfer unit. A cleaning solution spraying unit(70) sprays a cleaning solution on the thin plate. A drying unit(80) dries the cleaned thin plate.
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