| 摘要 |
FIELD: machine building. ^ SUBSTANCE: settling drums (2 and 3) of device are arranged opposite and parallel to each other to ensure padding S wound on them facing each drum. Elements 12 and 13 generate magnetic field converging plasma to surface of the drum facing gap 5 between the drums. The said elements are installed in each drum 2 and 3 for sedimentation. The device is equipped with source of plasma 14, polarity of which is alternately reversed between one electrode and another electrode. Pipe 8 supplies gas for formation of film into gap 5. The gap is vacuumised with a device for vacuumising. One electrode of source 14 of plasma feed is connected with one settling drum 2, while its another electrode is connected with another settling drum 3. ^ EFFECT: reduced sedimentation of film on internal part of vacuum chamber and prevention of film de-lamination. ^ 5 cl, 7 dwg |
