| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump which can efficiently increase a temperature of a stator. SOLUTION: The vacuum pump includes: a turbo pump part composed of multistage rotary vanes 8 formed on the exhaust upstream side of a rotor 2 and multistage fixed vanes 9 arranged alternately with respect to the multistage rotary vanes 8; and a drag pump part constructed of cylindrical rotor part 12 formed on the exhaust downstream side of the rotor 2 and a cylindrical screw stator 11 arranged on the outer peripheral side of the cylindrical rotor part 12 through a gap. In the screw stator 11, a heater 22 is embedded for heating the stator. The screw stator 11 is directly heated by the heater 22, consequently the temperature of the screw stator 11 is efficiently increased. COPYRIGHT: (C)2011,JPO&INPIT
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