FLEXURAL VIBRATION PIECE, FLEXURAL VIBRATOR, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a flexural vibration piece which suppresses the lowering of a Q value caused by a thermoelastic loss, and improves the efficiency of flexural vibration. SOLUTION: The flexural vibration piece includes: a base 10; and a plurality of vibrating arms 20 and 21 extending from the base 10. Each of the pair of vibrating arms 20 and 21 has first grooves 24 and 25 formed along the extension direction of the vibrating arms 20 and 21 at one-side main surface 22 and 23 along a direction in which the pair of vibrating arms 20 and 21 are aligned, and second grooves 28 and 29 formed in parallel to the first grooves 24 and 25 at other main surfaces 26 and 27. The sum of the depth of the first grooves 24 and 25 and the depth of the second grooves 28 and 29 is larger than an interval between the one-side main surfaces 22 and 23 and the other main surfaces 26 and 27. Masses 40 and 41, which add masses to the one-side main surfaces 22 and 23 being opening sides of the first grooves 24 and 25 formed toward outer sides opposite to inner sides on which the vibrating arms 20 and 21 face each other are provided at each of the pair of vibrating arms 20 and 21. COPYRIGHT: (C)2011,JPO&INPIT