SUBSTRATE PROCESSING APPARTUS AND SUBSTRATE TRANSFERRING METHOD FOR CONTROLLING THE SAME

摘要

PURPOSE: A substrate processing device ad a substrate transferring method are provided to improve the productivity of a substrate by maximizing a space availability and simplifying a substrate process. CONSTITUTION: A substrate is transferred on a conveyor according to a transfer route. A substrate processing unit(120) is arranged on the side of the conveyor and processes the substrate transferred from the conveyor. A transfer unit(130) rotates and is lifted on the upper side of the conveyor. The transfer unit picks up and transfers the substrate to the substrate processing unit. A hand unit(140) transfers the substrate from the substrate processing unit to the conveyor.