发明名称 Piezoaktuator med flerlagsindkapsling og fremgangsmåde til fremstilling deraf
摘要 In a method for producing a multilayer encapsulation (1) of a piezo actuator (5) such that the piezo actuator (5) is protected towards the outside without having to use an additional enveloping housing-type structure, in order to produce the multilayer encapsulation (1), an electrically insulating elastic layer (10) is first applied to the surface of the piezo actuator (5), whereupon a metallic layer is applied to the electrically insulating elastic layer (10) so as to planarly cover the same.
申请公布号 DK2011166(T3) 申请公布日期 2011.04.11
申请号 DK20070728434T 申请日期 2007.04.24
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 HENNIG, OLIVER;JENSEN, JENS DAHL;HAMANN, CHRISTOPH;LUGERT, GUENTER;MOCK, RANDOLF;SCHUH, CARSTEN;ZAPF, JOERG;BAYER, HEINER;FREUDENBERG, HELLMUT;GANSTER, AXEL
分类号 H01L41/04;H01L41/23 主分类号 H01L41/04
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