| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding device which sucks and holds a workpiece by a sufficient negative pressure when the workpiece is mounted on a suction table. SOLUTION: The workpiece holding device is equipped with: the suction table (6) having a plurality of suction holes (18) opened on a suction surface; and a sucking means (8) attached to the suction holes (18) of the suction table (6). The sucking means (8) includes: a vacuum pump (26); an ejector (28); and a compressed air supply source (E). The ejector (28) has: an air supply port (28a); an air exhaust port (28b); and a vacuum suction port (28c). The vacuum suction port (28c) of the ejector (28) is connected to the suction hole (18) of the suction table (6). The air supply port (28a) of the ejector (28) is connected to the compressed air supply source (E). The air exhaust port (28b) of the ejector (28) is connected to the vacuum pump (26). COPYRIGHT: (C)2011,JPO&INPIT |
