| 摘要 |
To provide a voltage controlled oscillator having small size and capable of obtaining a low phase noise characteristic over a large span of adjustable range of frequency. A quartz crystal having a characteristic (dielectric loss tangent: tanδ) better than that of fluorocarbon resin, LTCC or the like conventionally used as a substrate of a resonance part 1, and on which a fine pattern of metal film can be formed through a photolithography method, is used as a quartz-crystal substrate 10, and a conductive line is formed on the quartz-crystal substrate 10 to form an inductance element 11 in the resonance part 1. Accordingly, since the resonance part 1 having a high Q value can be formed, it is possible to obtain a voltage controlled oscillator having small size and low loss over a wide frequency band.
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