| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid ejection head in which a leading hole can be formed with a highly precise depth accuracy without being affected by plume and debris. SOLUTION: The manufacturing method of the liquid ejection head includes a process in which the leading hole is formed by irradiating a laser beam from a rear surface of a substrate which has an ejection opening to eject liquid droplets on a front surface and a resin layer that constitutes a liquid channel to communicate with the ejection opening, anisotropic etching is performed after the leading hole is formed, and a liquid supply port that communicates with the channel is formed. In the manufacturing method of the liquid ejection head, a laser processing depth of the leading hole is detected by receiving the laser beam that passes the substrate and the resin layer on the front surface side of the substrate by a confocal microscope when the leading hole is formed. COPYRIGHT: (C)2011,JPO&INPIT |
