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经营范围
发明名称
PROCESS FOR THE MANUFACTURE OF ETCHED ITEMS
摘要
申请公布号
EP2304777(A1)
申请公布日期
2011.04.06
申请号
EP20090780571
申请日期
2009.07.14
申请人
SOLVAY FLUOR UND DERIVATE GMBH
发明人
RIVA, MARCELLO
分类号
H01L21/311
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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