| 摘要 |
<p>Provided is a high-precision electron beam recording device capable of correcting rotary oscillation in the order of subnanometer. The device comprises a displacement detector having at least three displacement sensors which are located at mutually different angles in the radial direction of a turntable in order to detect displacement of a rotational side surface of the turntable in the radial direction, a shape calculator which calculates shape data on the basis of the roundness error of the turntable and the eccentric component of the turntable, a memory for storing the shape data, a rotary oscillation computing unit for calculating the rotary oscillation which does not contain the eccentric component of the turntable on the basis of the detected displacement from the displacement sensors at the time of the rotation of the turntable and the shape data, and a beam irradiation position adjustor for adjusting the irradiation position of the electron beam on the basis of the rotary oscillation.</p> |
