发明名称 |
SPATIAL LIGHT MODULATING DEVICE AND LASER ILLUMINATING DEVICE EQUIPPED WITH THE SAME, LASER MICROSCOPE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique of radiating a light of a desired pattern to an object without depending on a wavelength of the light. <P>SOLUTION: A spatial light modulating device 1 compensates a difference of an optical path length occurred between modulated lights (light beam La and light beam Lb) modulated in modulation regions (modulation region 3a and modulation region 3b) adjacent to a spatial light modulator 3 using deflection at compensation regions (compensation region 2a and compensation region 2b) of an optical path length compensator 2. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011064892(A) |
申请公布日期 |
2011.03.31 |
申请号 |
JP20090214597 |
申请日期 |
2009.09.16 |
申请人 |
OLYMPUS CORP |
发明人 |
HAYASHI SHINICHI |
分类号 |
G02B21/00;G02B27/09;G02B27/48;G03F7/20;H01L21/027 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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