发明名称 SPATIAL LIGHT MODULATING DEVICE AND LASER ILLUMINATING DEVICE EQUIPPED WITH THE SAME, LASER MICROSCOPE
摘要 <P>PROBLEM TO BE SOLVED: To provide a technique of radiating a light of a desired pattern to an object without depending on a wavelength of the light. <P>SOLUTION: A spatial light modulating device 1 compensates a difference of an optical path length occurred between modulated lights (light beam La and light beam Lb) modulated in modulation regions (modulation region 3a and modulation region 3b) adjacent to a spatial light modulator 3 using deflection at compensation regions (compensation region 2a and compensation region 2b) of an optical path length compensator 2. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011064892(A) 申请公布日期 2011.03.31
申请号 JP20090214597 申请日期 2009.09.16
申请人 OLYMPUS CORP 发明人 HAYASHI SHINICHI
分类号 G02B21/00;G02B27/09;G02B27/48;G03F7/20;H01L21/027 主分类号 G02B21/00
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