| 摘要 |
PROBLEM TO BE SOLVED: To provide a mirror unit of an exposure device that avoids torsion rotation of a mirror when the angle of the mirror is adjusted and is hardly affected by vibration. SOLUTION: The mirror 64 is arranged so that the longitudinal direction is inclined in the mirror width direction with respect to the scanning optical axis L<SB>0</SB>, the support point A of the mirror 64 on the one-point support side is set at the center of the width direction of the mirror 64, and the support point A and the support point B on the two-point support side are set on the scanning optical axis L<SB>0</SB>. Thus, the mirror rotation axis 0 can be aligned to the scanning optical axis L<SB>0</SB>, and the mirror center of gravity G can be set into the triangle region formed by interconnecting three support points A, B and C. As a result, the torsion rotation of the mirror 64 when the angle of the mirror is adjusted is avoided, and the effect of the vibration by the shift of the mirror center of gravity G is avoided. COPYRIGHT: (C)2011,JPO&INPIT |
