High temperature fine grain aluminium heater

摘要

An aluminum heated substrate support suitable for use in high temperature substrate processing systems and method for fabricating the same are provided. In one embodiment, an aluminum heated substrate support can include an aluminum body, a stem coupled to the body and a heating element disposed in the body. The body has an average grain size less than about 250 µm. In some embodiments, the stem to body joint is a fully penetrated lap weld that promotes service life of the substrate support.