发明名称 |
Device comprising a field of tips used in biotechnology applications |
摘要 |
A method for manufacturing a device including a field of micrometric tips, including forming a polycrystalline layer on a support; performing an anisotropic plasma etching of all or part of the polycrystalline layer by using a gas mixture including chlorine and helium, whereby tips are formed at the surface of the polycrystalline layer.
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申请公布号 |
US7915176(B2) |
申请公布日期 |
2011.03.29 |
申请号 |
US20060478858 |
申请日期 |
2006.06.30 |
申请人 |
STMICROELECTRONICS CROLLES 2 SAS |
发明人 |
DE SAGAZAN OLIVIER;DENOUAL MATTHIEU |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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