High density SRAM cell with hybrid devices

摘要

Hybrid SRAM circuit, hybrid SRAM structures and method of fabricating hybrid SRAMs. The SRAM structures include first and second cross-coupled inverters coupled to first and second pass gate devices. The pull-down devices of the inverters are FinFETs while the pull-up devices of the inverters and the pass gate devices are planar FETs or pull-down and pull-up devices of the inverters are FinFETs while the pass gate devices are planar FETs.