APPARATUS AND METHOD FOR TREATING SUBSTRATE,申请号KR20080118093-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR TREATING SUBSTRATE
摘要
申请公布号	KR101023751(B1)	申请公布日期	2011.03.28
申请号	KR20080118093	申请日期	2008.11.26
申请人		发明人
分类号	H01L23/60;H01L21/302	主分类号	H01L23/60
代理机构		代理人
主权项
地址

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