| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage container capable of eliminating the risk of jumping out of a substrate in detaching a lid body without needing to increase pressing force of a front retainer to a substrate, and to provide a method of handling a substrate. SOLUTION: This substrate storage container includes a container body for horizontally storing a semiconductor wafer 1, and a lid body for opening/closing the container body, wherein a rear retainer 17 for retaining a rear edge 2 of the semiconductor wafer 1 by being brought into contact with a valley 20 of a V-groove 18 is incorporated in the container body; the V-groove 18 is partitioned by a pair of inclined surfaces and an angle between them are set to 45-135°; and a front retainer 33 for scooping up the semiconductor wafer 1 to retain its front edge 3 is mounted to the lid body. A robot hand is entered in the container body and positioned below the semiconductor wafer 1, the semiconductor wafer 1 is lifted from a support piece 12 of the container body while moving the robot hand obliquely upward in the front direction of the container body, and the semiconductor wafer 1 is sucked and retracted onto the robot hand. COPYRIGHT: (C)2011,JPO&INPIT
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