PATTERNING METHOD, DEVICE MANUFACTURING METHOD USING THE PATTERNING METHOD, AND DEVICE

摘要

Provided is a patterning method, wherein a donor substrate, in which a light-to-heat conversion layer and a division pattern are formed on a substrate and a transferring material exists within said division pattern, is opposed to a device substrate and said transferring material is transferred on the device substrate by irradiating the light-to-heatconversion layer with light so that at least a part of said transferring material and at least a part of said division pattern are simultaneouslyheated. The patterning method enables large size and highly accurate fine patterning without degrading characteristics of thin films such as organic EL materials.