发明名称 HOT PLATE
摘要 PURPOSE: A hot plate structure is provided to heat the entire LCD panel at the same temperature to increase precision of a baking process of an LCD panel, thereby producing a product with good quality. CONSTITUTION: A main heater(50) is made of a group of unit heater(10) which is configured in a check type. A sub heater(60) is installed on the circumference of the main heater. At least one of the unit heater or the sub heater is a surface heating body. Power is individually supplied to the unit heater and the sub heater. An aluminum plate(20) vertically covers the main heater and the sub heater.
申请公布号 KR20110028093(A) 申请公布日期 2011.03.17
申请号 KR20090086020 申请日期 2009.09.11
申请人 ZEUS CO., LTD. 发明人 LEE, JOO HYOUNG
分类号 H01L21/687 主分类号 H01L21/687
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