| 摘要 |
PROBLEM TO BE SOLVED: To prevent a back electrode plate from interfering with an impedance conversion element by deflection deformation of a contact spring due to an impact load, in a capacitor microphone. SOLUTION: An annular member 26 supporting a spacer 24 of a capacitor structure portion C is arranged to surround a back electrode plate 16, and an annular substrate 36 supporting it is mounted on the upper surface of a circuit substrate 32 to surround an impedance conversion element 34. Thereafter a first conductive layer 32a electrically connected to an input terminal 34a of the impedance element 34 is formed on the upper surface of the circuit substrate 32, and a second conductive layer 36c electrically connected to the first conductive layer 32a is formed on the annular substrate 36 to extend from its undersurface to the upper surface. On the lower side of the back electrode plate 16, a contact spring 18 elastically pressing it upward is arranged in a deflected and deformed state to bring its lower end into contact with a portion of the second conductive layer 36c on the upper surface of the annular substrate 36. COPYRIGHT: (C)2011,JPO&INPIT
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