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发明名称
IMPROVED DETECTOR FOR CHARGED PARTICLE BEAM INSTRUMENT
摘要
申请公布号
EP2002459(A4)
申请公布日期
2011.03.09
申请号
EP20070754696
申请日期
2007.03.30
申请人
FEI COMPANY
发明人
KNOWLES, WILLIAM, RALPH;TOTH, MILOS
分类号
H01J37/28
主分类号
H01J37/28
代理机构
代理人
主权项
地址
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