METHOD AND EQUIPMENT FOR TREATING SUBSTRATE,申请号KR20080081929-传众专利搜索

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发明名称	METHOD AND EQUIPMENT FOR TREATING SUBSTRATE
摘要
申请公布号	KR101019212(B1)	申请公布日期	2011.03.04
申请号	KR20080081929	申请日期	2008.08.21
申请人		发明人
分类号	H01L21/677;H01L21/00;H01L21/02;H01L21/673	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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