PHOTOCATALYTIC MULTILAYER METALLIC COMPOUND THIN FILM AND METHOD FOR PREPARING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a photocatalytic titanium oxide thin film which has high photocatalytic characteristics at a low temperature, at high speed and at a low cost.

SOLUTION: The photocatalytic titanium oxide thin film is composed of: a seed layer composed of an amorphous metallic compound thin film formed on the surface of a base such as glass or plastics; and a crystalline metallic compound thin film grown into a columnar shape and formed on the seed layer. In forming the thin film, the photocatalytic titanium oxide thin film is prepared at a low cost with low temperature and high speed deposition by a sputtering method, without pretreatment or post-treatment with plasma of an activated gas and further without heat treatment.

COPYRIGHT: (C)2011,JPO&INPIT