| 发明名称 |
THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME |
| 摘要 |
A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. |
| 申请公布号 |
US2011053300(A1) |
申请公布日期 |
2011.03.03 |
| 申请号 |
US20100862125 |
申请日期 |
2010.08.24 |
| 申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
RYU JAE-KWANG;PARK HYUN-SOOK;LEE YUN-MI;KIM JONG-HEON;KIM SANG-SOO;OH JI-SOOK |
| 分类号 |
H01L51/56;B05B17/00 |
主分类号 |
H01L51/56 |
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