发明名称 POLYMERIZABLE COMPOUND, LACTONE-CONTAINING COMPOUND, METHOD FOR PRODUCING THE SAME, AND POLYMERIC COMPOUND PREPARED BY POLYMERIZING THE COMPOUND
摘要 <P>PROBLEM TO BE SOLVED: To provide a new polymeric compound useful for the production process for semiconductors including IC, for producing liquid crystals and circuit boards such as thermal heads, furthermore, for a resist composition used in lithographic processes in other photofabrications, and to provide a new polymerizable compound to be used in synthesizing the polymeric compound. <P>SOLUTION: The new polymerizable compound having a lactone structure represented by a specific structural formula is provided. Besides, the polymeric compound to be obtained by polymerizing the polymerizable compound is also provided. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011038066(A) 申请公布日期 2011.02.24
申请号 JP20090281056 申请日期 2009.12.10
申请人 FUJIFILM CORP 发明人 IIZUKA YUSUKE;IWATO KAORU;SAEGUSA HIROSHI;HIRANO SHUJI
分类号 C08F20/26;C07D307/00;G03F7/039;H01L21/027 主分类号 C08F20/26
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