发明名称 |
POLYMERIZABLE COMPOUND, LACTONE-CONTAINING COMPOUND, METHOD FOR PRODUCING THE SAME, AND POLYMERIC COMPOUND PREPARED BY POLYMERIZING THE COMPOUND |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new polymeric compound useful for the production process for semiconductors including IC, for producing liquid crystals and circuit boards such as thermal heads, furthermore, for a resist composition used in lithographic processes in other photofabrications, and to provide a new polymerizable compound to be used in synthesizing the polymeric compound. <P>SOLUTION: The new polymerizable compound having a lactone structure represented by a specific structural formula is provided. Besides, the polymeric compound to be obtained by polymerizing the polymerizable compound is also provided. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011038066(A) |
申请公布日期 |
2011.02.24 |
申请号 |
JP20090281056 |
申请日期 |
2009.12.10 |
申请人 |
FUJIFILM CORP |
发明人 |
IIZUKA YUSUKE;IWATO KAORU;SAEGUSA HIROSHI;HIRANO SHUJI |
分类号 |
C08F20/26;C07D307/00;G03F7/039;H01L21/027 |
主分类号 |
C08F20/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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