| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage equipment in which the vibration of the stage caused by a ultrasound motor in forwarding direction is quickly attenuated. SOLUTION: The stage equipment comprises a base plate 2, stage 3 and 4 provided on the base plate 2 and ultrasound motor 7 and 8 which drive the stage 3 and 4 respectively. The stage 4 provides a vibration absorber 14 with a natural frequency equal to that of the whole stage composed of the stage 3 and 4. The stage has an attenuator 14 for attenuating the vibration of the stage in the same direction to which the stage 3 is driven by the ultrasonic motor 7.</p> |
