| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt sensor which can measure each tilt angle of a regular reflection surface and an irregular reflection surface simultaneously by one sensor. SOLUTION: The tilt sensor includes an optical system constituted of a light projection part for emitting measuring light toward a detection domain, and a light reception part for receiving the measuring light reflected by the detection domain. The light projection part has a constitution including a light emitting element and a collimator lens, and the light reception part includes a regularly reflected light measuring part and an irregularly reflected light measuring part. The regularly reflected light measuring part includes a light receiving lens and a light receiving element, and the irregularly reflected light measuring part has a constitution including a light receiving lens, a light receiving element, an irregularly reflected light receiving mirror, and a regularly reflected light-irregularly reflected light composite half mirror. One light receiving lens is used in common for the light receiving lens in the regularly reflected light measuring part and the light receiving lens in the irregularly reflected light measuring part, and one light receiving element is used in common for the light receiving element in the regularly reflected light measuring part and the light receiving element in the irregularly reflected light measuring part. COPYRIGHT: (C)2011,JPO&INPIT
|
