STAGE UNIT FOR A PROBE STATION AND APPARATUS FOR TESTING A WAFER INCLUDING THE SAME,申请号KR20080129882-传众专利搜索

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发明名称	STAGE UNIT FOR A PROBE STATION AND APPARATUS FOR TESTING A WAFER INCLUDING THE SAME
摘要
申请公布号	KR101015600(B1)	申请公布日期	2011.02.17
申请号	KR20080129882	申请日期	2008.12.19
申请人		发明人
分类号	G01R1/067;H01L21/66	主分类号	G01R1/067
代理机构		代理人
主权项
地址

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