Forming floating body RAM using bulk silicon substrate

摘要

A method for forming a semiconductor device is provided. The method comprises providing a semiconductor structure comprising a semiconductor substrate and a dielectric layer on the semiconductor substrate, wherein the dielectric layer has an opening through which the semiconductor substrate is exposed; forming a semiconductor strip on the dielectric layer and adjacent the opening, wherein the semiconductor strip is electrically isolated from the semiconductor substrate; forming a gate dielectric over a portion of the semiconductor strip that is over the dielectric layer; forming a gate electrode over the gate dielectric; and forming a source/drain region in the semiconductor strip.