发明名称 |
METHOD OF MANUFACTURING ELECTRONIC COMPONENT, AND INSPECTION METHOD OF ELECTRONIC COMPONENT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an electronic component for less variations in quality and improved yield by suppressing fluctuation in oxygen deficit quantity. <P>SOLUTION: The method for manufacturing the electronic component includes an annealing step in which an elemental body having an electrode and a sintered body containing perovskite type oxide is annealed so that the sintered body is oxidized. It includes a first measuring step of measuring Raman spectrum of the perovskite type oxide before an annealing step, a second measuring step of measuring Raman spectrum of the perovskite type oxide after the annealing step, and an evaluation step of acquiring a shift amount of a peak in a lattice oscillation region based on the Raman spectrums measured by the first measuring step and the second measuring step. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011029272(A) |
申请公布日期 |
2011.02.10 |
申请号 |
JP20090171345 |
申请日期 |
2009.07.22 |
申请人 |
TDK CORP |
发明人 |
NATSUI HIDESADA;TAGUCHI YASUTAKA;YAMANE FUMIKAZU;TANAKA HIROBUMI;KAI NORITAKA;FUJIMURA TOMOYOSHI |
分类号 |
H01G13/00;C04B41/80;H01G4/12;H01L41/083;H01L41/187;H01L41/22 |
主分类号 |
H01G13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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