| 摘要 |
PURPOSE: A light source device is provided to stabilize the discharging state by restraining the discontinuity of the high temperature plasma state. CONSTITUTION: A light source device comprises an emitting tube(1) including a light emitting element, a pulse laser generator(21) emitting the pulse laser beam to the emitting tube, and a continuous wave laser generator emitting the continuous wave laser beam to the emitting tube. |
