Nondestructive analysis for periodic structure

摘要

There is provided a nondestructive analysis for a periodic structure. In the method, a virtual periodic structure is set and divided into a plurality of layers. By utilizing the Lippmann-Schwinger equation with an M-th order interpolation, physical properties related to reflectivity or transmittance of the virtual periodic structure are calculated. An M-th order interpolation formula employed in discretization of the Lippmann-Schwinger equation leads to an accurate and rapid calculation of the physical properties of the periodic structure.