| 发明名称 |
Methods for making electronic devices with a solution deposited gate dielectric |
| 摘要 |
A method of making an electronic device comprises solution depositing a dielectric composition onto a substrate and polymerizing the dielectric composition to form a gate dielectric. The dielectric composition comprises a polymerizable resin and zirconium oxide nanoparticles.
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| 申请公布号 |
US7879688(B2) |
申请公布日期 |
2011.02.01 |
| 申请号 |
US20070771787 |
申请日期 |
2007.06.29 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
NOVACK JAMES C.;VOGEL DENNIS E.;NELSON BRIAN K. |
| 分类号 |
H01L21/4763 |
主分类号 |
H01L21/4763 |
| 代理机构 |
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代理人 |
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