DIELECTRIC THIN FILM ELEMENT AND PROCESS FOR PRODUCTION THEREOF

摘要

Disclosed is a dielectric thin film element which has high moisture resistance and rarely undergoes the deterioration in properties thereof. Specifically disclosed is a dielectric thin film element (10) which comprises: a substrate (11); an adhesive layer (13) that is formed on one main surface of the substrate (11); a capacitance unit (20) that comprises a lower electrode layer (21) formed on the adhesive layer (13), a dielectric layer (22) formed on the lower electrode layer (21) and an upper electrode layer (23) formed on the dielectric layer (22); and a protective layer (30) that is so formed as to cover the capacitance unit (20). The dielectric thin film element (10) is characterized in that a rim part of the adhesive layer (13) is exposed from the protective layer (30).