PROCESS FOR PRODUCTION OF LAMINATE HAVING ALUMINUM NITRIDE MONOCRYSTAL LAYER, LAMINATE PRODUCED BY THE PROCESS, PROCESS FOR PRODUCTION OF ALUMINUM NITRIDE MONOCRYSTAL SUBSTRATE USING THE LAMINATE, AND ALUMINUM NITRIDE MONOCRYSTAL SUBSTRATE

摘要

Disclosed is a process for producing a laminate which has a laminated structure comprising an aluminum nitride monocrystal layer and an aluminum nitride multicrystal layer, wherein one of the main surfaces of the aluminum nitride monocrystal layer is exposed on the surface of the laminate, and the nitrogen content in multicrystals that constitute the aluminum nitride multicrystal layer is smaller than that in monocrystals that constitute the aluminum nitride monocrystal layer. The process enables the provision of "a substrate which has a surface composed of monocrystals of aluminum nitride and does not undergo cracking, breaking or warping", and which can be used suitably as a base substrate for use in the production of a self-supporting aluminum nitride monocrystal substrate. The process also enables the production of a high-quality self-supporting aluminum nitride monocrystal substrate with high efficiency.