ROBOT FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE HAVING THE SAME

摘要

PURPOSE: A substrate transfer robot and a substrate processing apparatus having the same are provided to prevent the dropping of a blade and the corrosion of a tray by transferring a plurality of substrates without using the tray. CONSTITUTION: A substrate transfer robot(210) comprises a rotation driving unit(222) rotating a blade(212) and a horizontal driving unit(220). The horizontal driving unit transfers the blade in the horizontal direction. The blade comprises a support structure for supporting the side of a substrate(20). The support structure comprises a plurality of support pins(214) supporting the side of the substrate.