SUBSTRATE FOR THE DEPOSITION OF A DEPOSITION APPARATUS, FILM-FORMING METHOD, AND METHOD FOR MANUFACTURING AN ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE USING THE SUBSTRATE FOR DEPOSITION

摘要

The present invention provides a substrate for the deposition of a deposition apparatus, a film-forming method, and a method for manufacturing an organic electroluminescence display device using the substrate for deposition, comprising: providing a substrate; forming a conductive layer for joule heating on the substrate; forming a first insulation film having grooves or holes on the conductive layer for joule heating; forming a deposition material layer on the first insulation film having grooves or holes; and applying electric fields to the conductive layer for joule heating to joule heat the deposition material layer. Consequently, the present invention has the effects of providing a film-forming method which is advantageous in manufacturing large devices.