| 摘要 |
PROBLEM TO BE SOLVED: To increase a temperature increase/decrease rate without deteriorating the thermal uniformity within a placing surface or while maintaining higher thermal uniformity than before.SOLUTION: A heater unit 10 has a first heat-equalizing plate 11 having a placing surface on which a substrate is placed, a second heat-equalizing plate 12 supporting the first heat-equalizing plate 11, and at least one layer of an insulated resistance heater 13 provided between the first heat-equalizing plate 11 and the second heat-equalizing plate 12, wherein the first heat-equalizing plate 11 and the second heat-equalizing plate 12 are connected with each other relatively movably in an approximately parallel direction to their facing surfaces, and wherein one out of the first heat-equalizing plate 11 and second heat-equalizing plate 12 comprises a metal and processed to have flexibility on at least one side, and the other is comprised of ceramic or metal-ceramic composite material. |
