| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic-coated electrode capable of applying to both a direct type plasma treatment apparatus and an indirect type plasma treatment device, without confining the physical properties of an object to be treated, and to provide the direct type plasma treatment device and the indirect type plasma treatment device that use the ceramic-coated electrode.SOLUTION: A first electrode 11 and a second electrode 12 are embedded inside a single ceramic-coated electrode 1A, and the first electrodes 11 and the second electrodes 12 are arranged alternately in a plurality of sets, in parallel with a predetermined cross section perpendicular to a surface having a maximum area of a ceramic substrate 2, at a predetermined interval. Since a least one of the surfaces having the maximum area of the ceramic substrate acts as a discharge surface, in the discharge surface, discharge is generated at a plurality of points between the first electrode 11 and the second electrode 12. |
