发明名称 Nano-positioning electromagnetic linear actuator
摘要 A flexure for an electromagnetic nano-positioning linear actuator having a support and an actuating body, the flexure comprising: a first resilient end for attaching to the support; a second resilient end for attaching to the actuating body; and a substantially rigid intermediate portion located between the first resilient end and the second resilient end.
申请公布号 US7868492(B2) 申请公布日期 2011.01.11
申请号 US20060084948 申请日期 2006.10.23
申请人 AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH 发明人 TEO TAT JOO;YANG GUILIN
分类号 H02K33/00 主分类号 H02K33/00
代理机构 代理人
主权项
地址