ION MICROSCOPE

摘要

Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. In an ion microscope provided with a gas field ionization ion source, a refrigerator for cooling the gas field ionization ion source is installed independently of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator is provided. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing properties.