| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion pump which is hardly affected by a leakage magnetic field, of which exhaust speed is improved, and in which ionization of a residual gas is promoted.SOLUTION: This ion pump includes: a cylindrical pump chamber 10 in which a flange 14 in order to be connected to a vacuum chamber is mounted on its one end and in which an electrode introduction terminal 21 is mounted on its another end; a metal rod 13 which is arranged at the interior center of the pump chamber 10 and in which its one end is connected to a high voltage via the electrode introduction terminal 21; ring-shaped magnets mounted on the outer peripheral face of the pump chamber 10 so as to have a ring shape with a spacing and to have the same surface magnetic pole direction; and a magnetic body yoke 24 wound at the outside of the ring-shaped magnets. |
